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<h2 id="see-also">See also</h2> <ul><li><a href="/facts/Silicon_on_insulator/fxSkXYmw">Silicon on insulator</a></li> <li><a href="/facts/Soitec/eBX2abxI">Soitec</a></li> <li><a href="/facts/CEA-Leti%3a_Laboratoire_d%2527%25C3%25A9lectronique_des_technologies_de_l%2527information/cKSzlPVp">CEA-Leti</a></li></ul> <h2 id="references">References</h2> <ol> <li id="fn:1"><p>US 5374564, Bruel, Michel, "Process for the production of thin semiconductor material films", published 20 December 1994 <a href="https://worldwide.espacenet.com/textdoc?DB=EPODOC&IDX=US5374564" target="_blank">https://worldwide.espacenet.com/textdoc?DB=EPODOC&IDX=US5374564</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> </ol>