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Polycide
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<h2 id="references">References</h2> <ol> <li id="fn:1"><p>Tsai, M. Y.; Chao, H. H.; Ephrath, L. M.; Crowder, B. L.; Cramer, A.; Bennett, R. S.; Lucchese, C. J.; Wordeman, M. R. (1981-10-01). "One-Micron Polycide (WSi2 on Poly-Si) MOSFET Technology". Journal of the Electrochemical Society. 128 (10): 2207–2214. doi:10.1149/1.2127219. ISSN 0013-4651. <a href="https://iopscience.iop.org/article/10.1149/1.2127219" target="_blank">https://iopscience.iop.org/article/10.1149/1.2127219</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> </ol>