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Microoptomechanical systems
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<h2 id="see-also">See also</h2> <ul><li><a href="/facts/Microoptoelectromechanical_systems/M1I2gj5g">Microoptoelectromechanical systems</a> (MOEMS)</li> <li><a href="/facts/Nanoelectromechanical_systems/S5ukNbuc">Nanoelectromechanical systems</a> (NEMS)</li></ul> <h2 id="references">References</h2> <ol> <li id="fn:1"><p>Dragoman, D (2001). "Micro/nano-optoeletromechanical Systems". Progress in Quantum Electronics. 25 (5–6): 229–290. doi:10.1016/s0079-6727(01)00012-x. Retrieved 13 December 2024. <a href="https://www.sciencedirect.com/science/article/abs/pii/S007967270100012X" target="_blank">https://www.sciencedirect.com/science/article/abs/pii/S007967270100012X</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> </ol>