Menu
Home
People
Places
Arts
History
Plants & Animals
Science
Life & Culture
Technology
Reference.org
Inverse lithography
open-in-new
<h2 id="references">References</h2> <ol> <li id="fn:1"><p>S. Chan; A. Wong; E. Lam (2008), "Initialization for robust inverse synthesis of phase-shifting masks in optical projection lithography", Optics Express, 16 (19): 14746–14760, Bibcode:2008OExpr..1614746C, doi:10.1364/OE.16.014746, PMID 18795012 <a href="http://www.opticsinfobase.org/abstract.cfm?uri=oe-16-19-14746" target="_blank">http://www.opticsinfobase.org/abstract.cfm?uri=oe-16-19-14746</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> <li id="fn:2"><p>Inverse Lithography Technology (ILT) <a href="https://semiengineering.com/knowledge_centers/manufacturing/lithography/photomask/inverse-lithography-technology-ilt/" target="_blank">https://semiengineering.com/knowledge_centers/manufacturing/lithography/photomask/inverse-lithography-technology-ilt/</a> <a href="#fnref:2" class="footnote-back-ref">↩</a></p></li> <li id="fn:3"><p>S. Chan; A. Wong; E. Lam (2008), "Initialization for robust inverse synthesis of phase-shifting masks in optical projection lithography", Optics Express, 16 (19): 14746–14760, Bibcode:2008OExpr..1614746C, doi:10.1364/OE.16.014746, PMID 18795012 <a href="http://www.opticsinfobase.org/abstract.cfm?uri=oe-16-19-14746" target="_blank">http://www.opticsinfobase.org/abstract.cfm?uri=oe-16-19-14746</a> <a href="#fnref:3" class="footnote-back-ref">↩</a></p></li> </ol>