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VMOS
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<h2 id="history">History</h2> <p>The <a href="/facts/MOSFET/eTDJT2Km">MOSFET</a> was invented at Bell Labs between 1955 and 1960.<a class="footnote-ref" id="fnref:3" href="#fn:3"><sup>3</sup></a><a class="footnote-ref" id="fnref:4" href="#fn:4"><sup>4</sup></a><a class="footnote-ref" id="fnref:5" href="#fn:5"><sup>5</sup></a><a class="footnote-ref" id="fnref:6" href="#fn:6"><sup>6</sup></a><a class="footnote-ref" id="fnref:7" href="#fn:7"><sup>7</sup></a><a class="footnote-ref" id="fnref:8" href="#fn:8"><sup>8</sup></a> The V-groove construction was pioneered by <a href="/facts/Jun-ichi_Nishizawa/0M526AVU">Jun-ichi Nishizawa</a> in 1969,<a class="footnote-ref" id="fnref:9" href="#fn:9"><sup>9</sup></a> initially for the <a href="/facts/Static_induction_transistor/s8TQhG8T">static induction transistor</a> (SIT), a type of junction <a href="/facts/Field-effect_transistor/TerYC6Nz">field-effect transistor</a> (<a href="/facts/JFET/oo5QxmTK">JFET</a>).<a class="footnote-ref" id="fnref:10" href="#fn:10"><sup>10</sup></a> </p><p>The VMOS was invented by <a href="/facts/Hitachi/KeK38e82">Hitachi</a> in 1969,<a class="footnote-ref" id="fnref:11" href="#fn:11"><sup>11</sup></a> when they introduced the first vertical <a href="/facts/Power_MOSFET/rfT6MMTf">power MOSFET</a> in Japan.<a class="footnote-ref" id="fnref:12" href="#fn:12"><sup>12</sup></a> <a href="/facts/T._J._Rodgers/5a8EYluM">T. J. Rodgers</a>, while he was a student at <a href="/facts/Stanford_University/JEQeF9z2">Stanford University</a>, filed a <a href="/facts/US_patent/uxtfSzha">US patent</a> for a VMOS in 1973.<a class="footnote-ref" id="fnref:13" href="#fn:13"><sup>13</sup></a> <a href="/facts/Siliconix/ATVA8K8y">Siliconix</a> commercially introduced a VMOS in 1975.<a class="footnote-ref" id="fnref:14" href="#fn:14"><sup>14</sup></a> The VMOS later developed into what became known as the vertical DMOS (<a href="/facts/VDMOS/rfT6MMTf">VDMOS</a>).<a class="footnote-ref" id="fnref:15" href="#fn:15"><sup>15</sup></a> </p><p>In 1978, <a href="/facts/American_Microsystems/2FwDdUbG">American Microsystems</a> (AMI) released the S2811.<a class="footnote-ref" id="fnref:16" href="#fn:16"><sup>16</sup></a><a class="footnote-ref" id="fnref:17" href="#fn:17"><sup>17</sup></a> It was the first <a href="/facts/Integrated_circuit/fjn6vg7C">integrated circuit</a> chip specifically designed as a <a href="/facts/Digital_signal_processor/YuBXweos">digital signal processor</a> (DSP), and was fabricated using VMOS, a technology that had previously not been mass-produced.<a class="footnote-ref" id="fnref:18" href="#fn:18"><sup>18</sup></a> </p> <h2 id="references">References</h2> <ol> <li id="fn:1"><p>Holmes, F.E.; Salama, C.A.T. (1974). "VMOS—A new MOS integrated circuit technology". Solid-State Electronics. 17 (8): 791–797. Bibcode:1974SSEle..17..791H. doi:10.1016/0038-1101(74)90026-4. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> <li id="fn:2"><p>Baliga, B. Jayant (2008), "Power MOSFETs", Fundamentals of Power Semiconductor Devices, Springer US, pp. 276–503, doi:10.1007/978-0-387-47314-7_6, ISBN 9780387473130 <a href="9780387473130" target="_blank">9780387473130</a> <a href="#fnref:2" class="footnote-back-ref">↩</a></p></li> <li id="fn:3"><p>Huff, Howard; Riordan, Michael (2007-09-01). "Frosch and Derick: Fifty Years Later (Foreword)". The Electrochemical Society Interface. 16 (3): 29. doi:10.1149/2.F02073IF. ISSN 1064-8208. <a href="https://iopscience.iop.org/article/10.1149/2.F02073IF" target="_blank">https://iopscience.iop.org/article/10.1149/2.F02073IF</a> <a href="#fnref:3" class="footnote-back-ref">↩</a></p></li> <li id="fn:4"><p>Frosch, C. J.; Derick, L (1957). "Surface Protection and Selective Masking during Diffusion in Silicon". Journal of the Electrochemical Society. 104 (9): 547. doi:10.1149/1.2428650. <a href="https://iopscience.iop.org/article/10.1149/1.2428650" target="_blank">https://iopscience.iop.org/article/10.1149/1.2428650</a> <a href="#fnref:4" class="footnote-back-ref">↩</a></p></li> <li id="fn:5"><p>KAHNG, D. (1961). "Silicon-Silicon Dioxide Surface Device". Technical Memorandum of Bell Laboratories: 583–596. doi:10.1142/9789814503464_0076. ISBN 978-981-02-0209-5. {{cite journal}}: ISBN / Date incompatibility (help) <a href="978-981-02-0209-5" target="_blank">978-981-02-0209-5</a> <a href="#fnref:5" class="footnote-back-ref">↩</a></p></li> <li id="fn:6"><p>Lojek, Bo (2007). History of Semiconductor Engineering. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg. p. 321. ISBN 978-3-540-34258-8. <a href="978-3-540-34258-8" target="_blank">978-3-540-34258-8</a> <a href="#fnref:6" class="footnote-back-ref">↩</a></p></li> <li id="fn:7"><p>Ligenza, J.R.; Spitzer, W.G. (1960). "The mechanisms for silicon oxidation in steam and oxygen". Journal of Physics and Chemistry of Solids. 14: 131–136. Bibcode:1960JPCS...14..131L. doi:10.1016/0022-3697(60)90219-5. <a href="https://linkinghub.elsevier.com/retrieve/pii/0022369760902195" target="_blank">https://linkinghub.elsevier.com/retrieve/pii/0022369760902195</a> <a href="#fnref:7" class="footnote-back-ref">↩</a></p></li> <li id="fn:8"><p>Lojek, Bo (2007). History of Semiconductor Engineering. Springer Science & Business Media. p. 120. ISBN 9783540342588. <a href="9783540342588" target="_blank">9783540342588</a> <a href="#fnref:8" class="footnote-back-ref">↩</a></p></li> <li id="fn:9"><p>Duncan, Ben (1996). High Performance Audio Power Amplifiers. Elsevier. pp. 178 & 406. ISBN 9780080508047. <a href="9780080508047" target="_blank">9780080508047</a> <a href="#fnref:9" class="footnote-back-ref">↩</a></p></li> <li id="fn:10"><p>U.S. patent 4,295,267 <a href="https://patents.google.com/patent/US4295267" target="_blank">https://patents.google.com/patent/US4295267</a> <a href="#fnref:10" class="footnote-back-ref">↩</a></p></li> <li id="fn:11"><p>"Advances in Discrete Semiconductors March On". Power Electronics Technology. Informa: 52–6. September 2005. Archived (PDF) from the original on 22 March 2006. Retrieved 31 July 2019. <a href="https://www.powerelectronics.com/content/advances-discrete-semiconductors-march" target="_blank">https://www.powerelectronics.com/content/advances-discrete-semiconductors-march</a> <a href="#fnref:11" class="footnote-back-ref">↩</a></p></li> <li id="fn:12"><p>Oxner, E. S. (1988). Fet Technology and Application. CRC Press. p. 18. ISBN 9780824780500. <a href="9780824780500" target="_blank">9780824780500</a> <a href="#fnref:12" class="footnote-back-ref">↩</a></p></li> <li id="fn:13"><p>U.S. patent 3,924,265 <a href="https://patents.google.com/patent/US3924265" target="_blank">https://patents.google.com/patent/US3924265</a> <a href="#fnref:13" class="footnote-back-ref">↩</a></p></li> <li id="fn:14"><p>"Advances in Discrete Semiconductors March On". Power Electronics Technology. Informa: 52–6. September 2005. Archived (PDF) from the original on 22 March 2006. Retrieved 31 July 2019. <a href="https://www.powerelectronics.com/content/advances-discrete-semiconductors-march" target="_blank">https://www.powerelectronics.com/content/advances-discrete-semiconductors-march</a> <a href="#fnref:14" class="footnote-back-ref">↩</a></p></li> <li id="fn:15"><p>Duncan, Ben (1996). High Performance Audio Power Amplifiers. Elsevier. pp. 177-8, 406. ISBN 9780080508047. <a href="9780080508047" target="_blank">9780080508047</a> <a href="#fnref:15" class="footnote-back-ref">↩</a></p></li> <li id="fn:16"><p>"1979: Single Chip Digital Signal Processor Introduced". The Silicon Engine. Computer History Museum. Retrieved 14 October 2019. <a href="https://www.computerhistory.org/siliconengine/single-chip-digital-signal-processor-introduced/" target="_blank">https://www.computerhistory.org/siliconengine/single-chip-digital-signal-processor-introduced/</a> <a href="#fnref:16" class="footnote-back-ref">↩</a></p></li> <li id="fn:17"><p>Taranovich, Steve (August 27, 2012). "30 years of DSP: From a child's toy to 4G and beyond". EDN. Retrieved 14 October 2019. <a href="https://www.edn.com/design/systems-design/4394792/30-years-of-DSP--From-a-child-s-toy-to-4G-and-beyond" target="_blank">https://www.edn.com/design/systems-design/4394792/30-years-of-DSP--From-a-child-s-toy-to-4G-and-beyond</a> <a href="#fnref:17" class="footnote-back-ref">↩</a></p></li> <li id="fn:18"><p>Taranovich, Steve (August 27, 2012). "30 years of DSP: From a child's toy to 4G and beyond". EDN. Retrieved 14 October 2019. <a href="https://www.edn.com/design/systems-design/4394792/30-years-of-DSP--From-a-child-s-toy-to-4G-and-beyond" target="_blank">https://www.edn.com/design/systems-design/4394792/30-years-of-DSP--From-a-child-s-toy-to-4G-and-beyond</a> <a href="#fnref:18" class="footnote-back-ref">↩</a></p></li> </ol>