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Mass flow controller
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<h2 id="see-also">See also</h2> <ul><li><a href="/facts/Control_valve/7cE7Jt09">Control valve</a></li> <li><a href="/facts/Coriolis_force/SqCyUY6d">Coriolis</a></li> <li><a href="/facts/Flow_control_valve/x0boveBY">Flow control valve</a></li> <li><a href="/facts/Flow_limiter/dPyqJhTE">Flow limiter</a></li> <li><a href="/facts/Flow_measurement/PvbEEcE8">Flow measurement</a></li> <li><a href="/facts/Mass_flow_meter/NBmMBXRb">Mass flow meter</a></li> <li><a href="/facts/Thermal_mass_flow_meter/HT51agcx">Thermal mass flow meter</a></li> <li><a href="/facts/Mass_flow_rate/v2DrbGvq">Mass flow rate</a></li></ul> <h2 id="external-links">External links</h2> <ul><li><a href="https://www.youtube.com/watch?v=BfdwD1V3jNk">How a Mass Flow Controller works video</a></li> <li><a href="https://www.youtube.com/watch?v=G62ma2IFh9o">Thermal Mass Flow Meter / Controller (Principle of operation) video</a></li> <li><a href="https://www.youtube.com/watch?v=v2D75dt77A8">MEMS-based thermal mass flow controller video</a></li></ul> <h2 id="references">References</h2> <ol> <li id="fn:1"><p>Tison, S. A. (1996). "A critical evaluation of thermal mass flow meters" (PDF). Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14 (4): 2582–2591. Bibcode:1996JVSTA..14.2582T. doi:10.1116/1.579985. ISSN 0734-2101. S2CID 39546958. Archived from the original (PDF) on 2019-03-02. <a href="https://web.archive.org/web/20190302124629/http://pdfs.semanticscholar.org/a391/45374befcc6812e83f6c9cca10a6db317c48.pdf" target="_blank">https://web.archive.org/web/20190302124629/http://pdfs.semanticscholar.org/a391/45374befcc6812e83f6c9cca10a6db317c48.pdf</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> </ol>