Atomic layer etching

<h2 id="external-links">External links</h2>
<ul><li><a href="http://jss.ecsdl.org/content/4/6.toc">ECS-JSS focus journal on atomic layer etch</a></li>
<li><a href="http://scitation.aip.org/content/avs/journal/jvsta/33/2/10.1116/1.4913379">Overview of atomic layer etching in the semiconductor industry</a></li></ul>

<h2 id="references">References</h2>

<ol>
<li id="fn:1"><p>"Atomic Layer Etch now in Fab Evaluations". 2014-08-04. Archived from the original on 2017-07-15. Retrieved 2015-05-29. <a href="https://web.archive.org/web/20170715234646/http://semimd.com/blog/2014/08/04/atomic-layer-etch-now-in-fab-evaluations/" target="_blank">https://web.archive.org/web/20170715234646/http://semimd.com/blog/2014/08/04/atomic-layer-etch-now-in-fab-evaluations/</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li>
<li id="fn:2"><p>Puurunen, Riikka L. (2014-12-01). "A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy". Chemical Vapor Deposition. 20 (10–11–12): 332–344. doi:10.1002/cvde.201402012. ISSN 1521-3862. <a href="https://zenodo.org/record/3228179" target="_blank">https://zenodo.org/record/3228179</a> <a href="#fnref:2" class="footnote-back-ref">↩</a></p></li>
</ol>

Atomic layer etching open-in-new

Atomic layer etching