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Coherence scanning interferometry
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<h2 id="applications-of-coherence-scanning-interferometry">Applications of Coherence Scanning Interferometry</h2> <p>Coherence Scanning Interferometry (CSI), also known as White Light Interferometry, is an optical metrology technique used for measuring surface topography in three dimensions with sub-nanometer vertical resolution. It is widely employed in both research and industrial settings due to its non-contact operation and high precision. </p><p>The capability to perform rapid 3D measurements is essential in many applications, either because the sample may change over time or due to the need to reduce inspection time and costs in industrial environments. Key application areas include: </p> <h3>Additive Manufacturing</h3> <p>In metal additive manufacturing (AM), the process involves a complex set of parameters that are difficult to control precisely. Surface texture analysis can reveal characteristic features linked to specific processing conditions. CSI enables fast and accurate topographic measurement of metal AM parts, even on surfaces with low reflectance or steep slopes beyond the numerical aperture of the objective. This makes CSI a valuable tool for process development, defect detection, and quality assurance in AM workflows.<a class="footnote-ref" id="fnref:17" href="#fn:17"><sup>17</sup></a> </p> <h3>Surface Topography Measurement</h3> <p>CSI is widely used to measure the 3D shape of both smooth and rough surfaces. This is critical for quality control and process optimization across multiple industries, including aerospace, automotive, and biomedical manufacturing. </p> <h3>Optical Metrology</h3> <p>CSI is essential for the characterization of optical components such as lenses and mirrors. It allows precise measurement of surface form, flatness, and radius of curvature, contributing to the performance and reliability of optical systems. </p> <h3>Thin Film Characterization</h3> <p>CSI can also be used to measure the thickness and surface profile of thin films, including buried layers. This application is particularly important in the semiconductor, optics, and advanced coatings industries, where film uniformity and layer definition are critical.<a class="footnote-ref" id="fnref:18" href="#fn:18"><sup>18</sup></a> </p> <p><a class="footnote-ref" id="fnref:19" href="#fn:19"><sup>19</sup></a> </p><p><a class="footnote-ref" id="fnref:20" href="#fn:20"><sup>20</sup></a> </p> <h2 id="references">References</h2> <h2 id="references">References</h2> <ol> <li id="fn:1"><p>de Groot, P (2015). "Principles of interference microscopy for the measurement of surface topography". Advances in Optics and Photonics. 7 (1): 1–65. Bibcode:2015AdOP....7....1D. doi:10.1364/AOP.7.000001. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> <li id="fn:2"><p>ISO (2013). 25178-604:2013(E): Geometrical product specification (GPS) – Surface texture: Areal – Nominal characteristics of non-contact (coherence scanning interferometric microscopy) instruments (2013(E) ed.). Geneva: International Organization for Standardization. <a href="/wiki/ISO_25178" target="_blank">/wiki/ISO_25178</a> <a href="#fnref:2" class="footnote-back-ref">↩</a></p></li> <li id="fn:3"><p>Windecker, R.; Haible, P.; Tiziani, H. J. (1995). "Fast Coherence Scanning Interferometry for Measuring Smooth, Rough and Spherical Surfaces". Journal of Modern Optics. 42 (10): 2059–2069. Bibcode:1995JMOp...42.2059W. doi:10.1080/09500349514551791. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:3" class="footnote-back-ref">↩</a></p></li> <li id="fn:4"><p>Davidson, M.; Kaufman, K.; Mazor, I. (1987). "The Coherence Probe Microscope". Solid State Technology. 30 (9): 57–59. <a href="#fnref:4" class="footnote-back-ref">↩</a></p></li> <li id="fn:5"><p>Lee, B. S.; Strand, T. C. (1990). "Profilometry with a coherence scanning microscope". Appl Opt. 29 (26): 3784–3788. Bibcode:1990ApOpt..29.3784L. doi:10.1364/ao.29.003784. PMID 20567484. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:5" class="footnote-back-ref">↩</a></p></li> <li id="fn:6"><p>Dresel, T.; Häusler, G.; Venzke, H. (1992). "Three-dimensional sensing of rough surfaces by coherence radar". Applied Optics. 31 (7): 919–925. Bibcode:1992ApOpt..31..919D. doi:10.1364/ao.31.000919. 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CiteSeerX 10.1.1.190.4728. doi:10.1364/josaa.13.000832. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:9" class="footnote-back-ref">↩</a></p></li> <li id="fn:10"><p>Wyant, J. C. (September, 1993). How to extend interferometry for rough-surface tests. Laser Focus World, 131-135. <a href="#fnref:10" class="footnote-back-ref">↩</a></p></li> <li id="fn:11"><p>Deck, L.; de Groot, P. (1994). "High-speed noncontact profiler based on scanning white-light interferometry". Applied Optics. 33 (31): 7334–7338. Bibcode:1994ApOpt..33.7334D. doi:10.1364/ao.33.007334. PMID 20941290. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:11" class="footnote-back-ref">↩</a></p></li> <li id="fn:12"><p>Schmit, J.; Olszak, A. G. (2002). Creath, Katherine; Schmit, Joanna (eds.). "Challenges in white-light phase-shifting interferometry". Proc. SPIE. Interferometry XI: Techniques and Analysis. 4777: 118–127. Bibcode:2002SPIE.4777..118S. doi:10.1117/12.472211. S2CID 128892213. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:12" class="footnote-back-ref">↩</a></p></li> <li id="fn:13"><p>Harasaki, A.; Schmit, J.; Wyant, J. C. (2000). "Improved vertical-scanning interferometry". Applied Optics. 39 (13): 2107–2115. Bibcode:2000ApOpt..39.2107H. doi:10.1364/ao.39.002107. hdl:10150/289148. PMID 18345114. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:13" class="footnote-back-ref">↩</a></p></li> <li id="fn:14"><p>Caber, P. J. (1993). "Interferometric profiler for rough surfaces". Appl Opt. 32 (19): 3438–3441. Bibcode:1993ApOpt..32.3438C. doi:10.1364/ao.32.003438. PMID 20829962. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:14" class="footnote-back-ref">↩</a></p></li> <li id="fn:15"><p>De Groot, P.; Biegen, J.; Clark, J.; Colonna; de Lega, X.; Grigg, D. (2002). "Optical Interferometry for Measurement of the Geometric Dimensions of Industrial Parts". Applied Optics. 41 (19): 3853–3860. Bibcode:2002ApOpt..41.3853D. doi:10.1364/ao.41.003853. PMID 12099592. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:15" class="footnote-back-ref">↩</a></p></li> <li id="fn:16"><p>Dubois, A; Vabre, L; Boccara, AC; Beaurepaire, E (2002). "High-resolution full-field optical coherence tomography with a Linnik microscope". Applied Optics. 41 (4): 805–12. Bibcode:2002ApOpt..41..805D. doi:10.1364/ao.41.000805. PMID 11993929. <a href="/wiki/Bibcode_(identifier)" target="_blank">/wiki/Bibcode_(identifier)</a> <a href="#fnref:16" class="footnote-back-ref">↩</a></p></li> <li id="fn:17"><p>Cite error: The named reference Leach2017 was invoked but never defined (see the help page). <a href="/wiki/Help:Cite_errors/Cite_error_references_no_text" target="_blank">/wiki/Help:Cite_errors/Cite_error_references_no_text</a> <a href="#fnref:17" class="footnote-back-ref">↩</a></p></li> <li id="fn:18"><p>Cite error: The named reference Takaki2022 was invoked but never defined (see the help page). <a href="/wiki/Help:Cite_errors/Cite_error_references_no_text" target="_blank">/wiki/Help:Cite_errors/Cite_error_references_no_text</a> <a href="#fnref:18" class="footnote-back-ref">↩</a></p></li> <li id="fn:19"><p>Leach, Richard; Carmignato, Simone; Dewulf, Wim; Donmez, Alkan; Hebert, Pierre; Newman, Steven T. (2017). "Coherence scanning interferometry for additive manufacture". CIRP Annals. 66 (2): 781–802. doi:10.1016/j.cirp.2017.05.001. <a href="https://www.researchgate.net/publication/317888768_Coherence_scanning_interferometry_for_additive_manufacture" target="_blank">https://www.researchgate.net/publication/317888768_Coherence_scanning_interferometry_for_additive_manufacture</a> <a href="#fnref:19" class="footnote-back-ref">↩</a></p></li> <li id="fn:20"><p>Takaki, Yasuhiro; Murata, Shuhei (2022). "Single-shot optical surface profiling using extended depth-of-field 3D microscopy". Precision Engineering. 78: 12–20. doi:10.1016/j.precisioneng.2022.02.005. <a href="https://www.researchgate.net/publication/362268296_Single-shot_optical_surface_profiling_using_extended_depth_of_field_3D_microscopy" target="_blank">https://www.researchgate.net/publication/362268296_Single-shot_optical_surface_profiling_using_extended_depth_of_field_3D_microscopy</a> <a href="#fnref:20" class="footnote-back-ref">↩</a></p></li> </ol>