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Resolution enhancement technology
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<h2 id="see-also">See also</h2> <ul><li><a href="/facts/Resolution_enhancement_technologies/VPuKrSas">Resolution enhancement technologies</a></li></ul> <h2 id="external-reference">External reference</h2> <ul><li>Schellenberg, Franklin M. (May 28, 2004). Smith, Bruce W (ed.). <a href="https://www.researchgate.net/publication/253537890">"Resolution enhancement technology: the past, the present, and extensions for the future"</a>. <i>Proc. SPIE 5377, Optical Microlithography XVII</i>. Optical Microlithography XVII. 5377: 1. <a href="/facts/Bibcode_(identifier)/9HtdQSGB">Bibcode</a>:<a href="https://ui.adsabs.harvard.edu/abs/2004SPIE.5377....1S">2004SPIE.5377....1S</a>. <a href="/facts/Doi_(identifier)/muM9Etpq">doi</a>:<a href="https://doi.org/10.1117%2F12.548923">10.1117/12.548923</a>. <a href="/facts/S2CID_(identifier)/ldJsHa2Y">S2CID</a> <a href="https://api.semanticscholar.org/CorpusID:110913847">110913847</a>. Retrieved 19 October 2016.</li> <li><a href="https://web.archive.org/web/20160531194835/https://www.mentor.com/products/ic-manufacturing/computational-lithography/">"Calibre Computational Lithography"</a>. <i>Mentor Graphics</i>. Archived from <a href="http://www.mentor.com/products/ic_nanometer_design/litho_modeling/">the original</a> on 2016-05-31. Retrieved 19 October 2016.</li> <li><a href="https://web.archive.org/web/20081121093102/http://www.synopsys.com./products/solutions/dfm.html">"Synopsys RTL-to-Silicon Solution"</a>. Archived from <a href="http://www.synopsys.com./products/solutions/dfm.html">the original</a> on 2008-11-21.</li></ul>