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Journal of Vacuum Science and Technology
open-in-new
<h2 id="history">History</h2> <ul><li>1964–1982 <i>Journal of Vacuum Science and Technology</i></li> <li>1983–present <i>Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films</i></li> <li>1983–1990 <i>Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena</i></li> <li>1991–present <i>Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures</i></li></ul> <h2 id="part-a">Part <i>A</i></h2> <p>Part <i>A</i> covers applied <a href="/facts/Surface_science/WTENdutJ">surface science</a>, electronic materials and processing, fusion technology, plasma technology, <a href="/facts/Surface_science/WTENdutJ">surface science</a>, <a href="/facts/Thin_films/nSeoUT4Q">thin films</a>, <a href="/facts/Vacuum_metallurgy/wlrzK4UI">vacuum metallurgy</a>, and vacuum technology. According to the <i><a href="/facts/Journal_Citation_Reports/H13uyJqD">Journal Citation Reports</a></i>, the journal has a 2015 <a href="/facts/Impact_factor/CamGH5MQ">impact factor</a> of 1.724.<a class="footnote-ref" id="fnref:1" href="#fn:1"><sup>1</sup></a> </p> <h2 id="part-b">Part <i>B</i></h2> <p>Part <i>B</i> covers vacuum and <a href="/facts/Plasma_processing/J0RTzpNG">plasma processing</a> of various materials, their structural characterization, <a href="/facts/Microlithography/LFwpJbE7">microlithography</a>, and the physics and chemistry of submicrometer and nanometer structures and devices. According to the <i><a href="/facts/Journal_Citation_Reports/H13uyJqD">Journal Citation Reports</a></i>, the journal has a 2014 <a href="/facts/Impact_factor/CamGH5MQ">impact factor</a> of 1.398.<a class="footnote-ref" id="fnref:2" href="#fn:2"><sup>2</sup></a> </p> <h2 id="external-links">External links</h2> <ul><li><a href="http://scitation.aip.org/content/avs/journal/jvst">Official website</a></li></ul> <h2 id="references">References</h2> <ol> <li id="fn:1"><p>"Journal of Vacuum Science and Technology, Part A". 2015 Journal Citation Reports. Web of Science (Science ed.). Thomson Reuters. 2016. <a href="/wiki/Journal_Citation_Reports" target="_blank">/wiki/Journal_Citation_Reports</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> <li id="fn:2"><p>"Journal of Vacuum Science and Technology, Part B". 2015 Journal Citation Reports. Web of Science (Science ed.). Thomson Reuters. 2016. <a href="/wiki/Journal_Citation_Reports" target="_blank">/wiki/Journal_Citation_Reports</a> <a href="#fnref:2" class="footnote-back-ref">↩</a></p></li> </ol>