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MEMS sensor generations
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<h2 id="references">References</h2> <ol> <li id="fn:1"><p>Terry, S.C.; Jerman, J.H.; Angell, J.B. (December 1979). "A gas chromatographic air analyzer fabricated on a silicon wafer". IEEE Transactions on Electron Devices. 26 (12): 1880–1886. doi:10.1109/T-ED.1979.19791. <a href="/wiki/Doi_(identifier)" target="_blank">/wiki/Doi_(identifier)</a> <a href="#fnref:1" class="footnote-back-ref">↩</a></p></li> </ol>