A microscanner, or micro scanning mirror, is a microoptoelectromechanical system (MOEMS) in the category of micromirror actuators for dynamic light modulation. Depending upon the type of microscanner, the modulatory movement of a single mirror can be either translatory or rotational, on one or two axes. In the first case, a phase shifting effect takes place. In the second case, the incident light wave is deflected.
Microscanners are different from spatial light modulators and other micromirror actuators which need a matrix of individually addressable mirrors in order to accomplish the desired modulation at any yield. If a single array mirror accomplishes the desired modulation but is operated in parallel with other array mirrors to increase light yield, then the term microscanner array is used.