Sequential infiltration synthesis (SIS) is a technique derived from atomic layer deposition (ALD) in which a polymer is infused with inorganic material using sequential, self-limiting exposures to gaseous precursors, enabling precise manipulation over the composition, structure, and properties. The technique has applications in fields such as nanotechnology, materials science, and electronics, where precise material engineering is required.
This synthesis uses metal-organic vapor-phase precursors and co-reactants that dissolve and diffuse into polymers. These precursors interact with the functional groups of the polymers through reversible complex formation or irreversible chemical reactions, resulting in composite materials that can exhibit nano-structured properties. The metal-organic precursor (A) and co-reactant vapor (B) are supplied in an alternating ABAB sequence. Following SIS, the organic phase may be removed thermally or chemically to leave only the inorganic components behind. This approach facilitates the fabrication of materials with controlled properties such as composition, stylometric, porosity, conductivity, refractive index, and chemical functionality on the nano-scale.
SIS has been utilized in fields, including electronics, energy storage, AI, and catalysis, for its ability to modify material properties. SIS is sometimes referred to as "multiple pulsed vapor-phase infiltration" (MPI), "vapor phase infiltration" (VPI) or "sequential vapor infiltration" (SVI).
SIS involves the 3D distribution of functional groups in polymers, while its predecessor, ALD, is associated with the two-dimensional distribution of reactive sites on solid surfaces. In SIS, the partial pressures and exposure times for the precursor pulse are typically larger compared to ALD to ensure adequate infiltration of the precursor into the three-dimensional polymer volume through dissolution and diffusion. The process relies on the diffusive transport of precursors within polymers, with the resulting distribution influenced by time, pressure, temperature, polymer chemistry, and micro-structure.