Sheet resistance

<p>Sheet resistance is the resistance of a square piece of a thin material with contacts made to two opposite sides of the square. It is usually a measurement of <a href="/facts/Electrical_resistance/hxSt0UAj">electrical resistance</a> of thin films that are uniform in thickness. It is commonly used to characterize materials made by semiconductor doping, metal deposition, resistive paste printing, and <a href="/facts/Insulated_glazing/S4s08h6n">glass coating</a>. Examples of these processes are: <a href="/facts/Doping_(semiconductors)/WrGdtWnm">doped</a> <a href="/facts/Semiconductor/zFf3mGTE">semiconductor</a> regions (e.g., <a href="/facts/Silicon/cgWx0hdr">silicon</a> or <a href="/facts/Polysilicon/NdywIRGW">polysilicon</a>), and the resistors that are <a href="/facts/Printed_electronics/8pJAYCSb">screen printed</a> onto the substrates of <a href="/facts/Hybrid_integrated_circuit/LbHBe5L3">thick-film hybrid microcircuits</a>.
</p><p>The utility of sheet resistance as opposed to <a href="/facts/Electrical_resistance/hxSt0UAj">resistance</a> or <a href="/facts/Resistivity/akyCKvMy">resistivity</a> is that it is directly measured using a <a href="/facts/Four-terminal_sensing/VdkPQnPQ">four-terminal sensing</a> measurement (also known as a four-point probe measurement) or indirectly by using a non-contact eddy-current-based testing device. Sheet resistance is invariable under scaling of the film contact and therefore can be used to compare the electrical properties of devices that are significantly different in size.
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Sheet resistance