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Reference.org
Feature-oriented scanning
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<p>Feature-oriented scanning (FOS) is a method of precision measurement of surface topography with a <a href="/facts/Scanning_probe_microscope/uJJPXQLN">scanning probe microscope</a> in which surface features (objects) are used as reference points for microscope probe attachment. With FOS method, by passing from one surface feature to another located nearby, the relative distance between the features and the feature neighborhood topographies are measured. This approach allows to scan an intended area of a surface by parts and then reconstruct the whole image from the obtained fragments. Beside the mentioned, it is acceptable to use another name for the method – object-oriented scanning (OOS). </p>