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Journal of Vacuum Science and Technology
open-in-new
<p>The <i>Journal of Vacuum Science and Technology</i> is a <a href="/facts/Peer-reviewed/ly6yEgcW">peer-reviewed</a> <a href="/facts/Scientific_journal/A4Slzknw">scientific journal</a> published in two parts, <i>A</i> and <i>B</i>, by the <a href="/facts/American_Institute_of_Physics/XM6sCnm9">American Institute of Physics</a> on behalf of the <a href="/facts/American_Vacuum_Society/dkDqumtl">American Vacuum Society</a>. It was established in 1964 and the <a href="/facts/Editor-in-chief/d76Qb3Tr">editor-in-chief</a> is Eray Aydil (<a href="/facts/University_of_Minnesota/vN1uQvP5">University of Minnesota</a>). </p>