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Reference.org
Interference lithography
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<p>Interference lithography (or holographic lithography) is a technique that uses <a href="/facts/Coherent_light/NF1Rgdoa">coherent light</a> (such as light from a <a href="/facts/Laser/jk6PTvvT">laser</a>) for patterning regular arrays of fine features without the use of complex <a href="/facts/Optics/p0vq4S1T">optical</a> systems or <a href="/facts/Photomask/xCdRhIod">photomasks</a>. </p>