Elastic recoil detection

Elastic recoil detection analysis (ERDA), also referred to as forward <a href="/facts/Recoil/wGukfupU">recoil</a> scattering or <a href="/facts/Spectrometer/IqRE8xaQ">spectrometry</a>, is an <a href="/facts/Ion_beam/e23WW7uC">ion beam</a> analysis technique, in <a href="/facts/Materials_science/N5HrXRYW">materials science</a>, to obtain elemental <a href="/facts/Concentration/wqBmz5od">concentration</a> depth profiles in <a href="/facts/Thin_films/nSeoUT4Q">thin films</a>. This technique can be achieved using many processes.
In the technique of ERDA, an <a href="/facts/Energy/wd8PrQM7">energetic</a> ion beam is directed at a sample to be characterized and (as in <a href="/facts/Rutherford_backscattering_spectrometry/ReFUhwDe">Rutherford backscattering</a>) there is an <a href="/facts/Nuclear_interaction/A2MyJoWE">elastic nuclear interaction</a> between the <a href="/facts/Ions/wrbwhF3z">ions</a> of the beam and the <a href="/facts/Atoms/FoQ4kGN5">atoms</a> of the target sample. Such interactions are commonly of <a href="/facts/Coulomb%2527s_law/V0lR5NKv">Coulomb</a> nature. Depending on the <a href="/facts/Kinetics_(physics)/wcB4xqpN">kinetics</a> of the ions, <a href="/facts/Cross_section_(physics)/lo014h2D">cross section</a> area, and the loss of energy of the ions in the matter, ERDA helps determine the <a href="/facts/Quantification_(science)/5YoKbeTW">quantification</a> of the <a href="/facts/Elemental_analysis/Auo8Gvzs">elemental analysis</a>. It also provides information about the depth profile of the sample.
The energy of incident energetic ions can vary from 2 <a href="/facts/Electronvolt/YMT1fqX9">MeV</a> to 200 MeV, depending on the studied sample. The energy of the beam should be enough to kick out (“recoil”) the atoms of the sample. Thus, ERDA usually employs appropriate source and detectors to detect <a href="/facts/Atomic_recoil/9DoQJ7At">recoiled atoms</a>.
ERDA setup is large, expensive and difficult to operate. Therefore, although it is commercially available, it is relatively uncommon in <a href="/facts/Characterization_(materials_science)/FDzNl7B7">materials characterization</a>. The <a href="/facts/Angle_of_incidence_(optics)/DTaCjhTU">angle of incidence</a> that an ion beam makes with the sample must also be taken into account for correct analysis of the sample. This is because, depending on this angle, the recoiled atoms will be collected.
ERDA has been used since 1974. It has similar theory to Rutherford backscattering spectrometry (RBS), but there are minor differences in the set-up of the experiment. In case of RBS, the <a href="/facts/Sensor/RN8SXbjs">detector</a> is placed in the back of the sample whereas in ERDA, the detector is placed in the front.

Elastic recoil detection open-in-new

Elastic recoil detection