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Reference.org
Computational lithography
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<p>Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through <a href="/facts/Photolithography/FTHsauvy">photolithography</a>. Computational lithography came to the forefront of photolithography technologies in 2008 when the <a href="/facts/Semiconductor_industry/v2LNPolL">semiconductor industry</a> faced challenges associated with the transition to a <a href="/facts/22_nm_process/zr0VI9w6">22 nanometer</a> <a href="/facts/CMOS/NJIWYgBl">CMOS</a> microfabrication process and has become instrumental in further shrinking the design nodes and topology of semiconductor transistor manufacturing. </p>